NanoWatt低壓等離子涂層系統(tǒng) LFL-CoatML

General

整體介紹

The NW-CoatML system is a medium-sized low-pressure plasma system capable of plasma

coating components using liquid precursors. The components to be treated are put in trays, which are inserted into the vacuum chamber.

NW-CoatML是一種中使用液態(tài)單體的低壓的等離子處理系統(tǒng)。處理產(chǎn)品時首先將產(chǎn)品放在托盤上，之后把托盤放入真空腔體進行處理。

The equipment operates in batches.

該設(shè)備是按照批次處理產(chǎn)品的。

The system is completely comprised in a welded and powder coated rigid steel frame. The frame is closed at the bottom (with a cut-out for the vacuum pump) as well as at the sides and is open at the top. Pump as well as fully enclosed electrical cabinet are comprised within the

frame.

該系統(tǒng)使用全包的焊接框架結(jié)構(gòu)。框架的底部有（用于安裝真空泵的切口），其側(cè)面是封閉的，頂部是開放的。真空泵以及電控柜完全包含在內(nèi)部。

Applications

應(yīng)用

Low-pressure plasma system NW-****M* (for reference only)

低壓等離子系統(tǒng)NW-****M*（圖片僅供參考）

Vacuum chamber

真空腔室

The process chamber is made of special grade aluminum with wall thickness of 30mm. All

welds are done in several passes at the interior and exterior of the chamber, which assures a long-lasting vacuum tightness for the full lifespan of the machine, which can easily be over 20 years.

真空腔體由壁厚30mm特級鋁制成。全部焊接在腔室的內(nèi)部和外部分多次完成，這確保了機器的整個使用壽命（很容易超過 20 年），以及持久真空密封性。

The vacuum chamber has approximated inner dimensions of w900*d800*h1000 mm, bringing the internal volume to approximate 0,72m³ or 720 litre.

真空腔體的內(nèi)部尺寸約為 長900*寬800*高1000 毫米，內(nèi)部容積約為 0.72 立方米或 720 升。

The vacuum chamber contains the material to be treated (components) as well as the complete electrode setup needed to treat the material.

真空腔體內(nèi)包含要處理的材料（組件）以及處理材料所需的完整電極結(jié)構(gòu)。

The chamber has heated walls and is fully thermally insulated.

腔體壁具有加熱功能并且完全隔熱。

The chamber is closed with a swivelling door, which is operated manually and equipped with closing handles. The door O-ring is fixed using a proprietary design, allowing an easy & hassle- free exchange. The door is heated and fully thermally insulated.

腔體門配有把手，手動進行旋轉(zhuǎn)開關(guān)。腔門密封圈使用專門的設(shè)計固定，同時，也可以輕松更換。墻門也是可以加熱并且完全隔熱的。

Vacuum pump

真空泵

The vacuum pump group consists of 2 pumps, both dry pumps. This type of pumps has aproven track record in the semiconductor processing industry. This water-cooled pump-combo delivers a pumping speed of 480m³/h.

真空泵由泵組構(gòu)成，包含兩個泵，均為干泵。這種泵在半導(dǎo)體加工領(lǐng)域有著很好的應(yīng)用。該泵組使用水冷，可達480m³/h的抽速。

Vacuum

valves/connection

真空閥門/連接

The chamber can be isolated from the pump through a heated and thermally insulated ISO100

angle valve.

腔體和真空泵之間通過一個可以加熱且良好隔熱的ISO100真空角閥。

All connections between pump, valves and chamber are made of stainless-steel grade 304, are electrically heated and thermally insulated. The pump connection is specifically designed to ensure homogeneous flow characteristics during the coating process.

泵、閥門和腔室之間的所有連接均由 304 級不銹鋼制成，管路加熱使用電加熱，同時做好了絕熱。專門設(shè)計的泵連接確保涂層過程中的均勻流動特性,從而保證產(chǎn)品處理的均勻性。

Pressure gauges

真空計

The system holds 3 independent pressure gauges:

系統(tǒng)包含3個獨立的真空計

One atmosphere indicator 一個常壓傳感器

One Pirani gauge to control the pump cycle 一個皮拉尼真空計控制抽真空過程測量

One heated capacitance gauge to control process pressure The pressure gauges have protecting KF16 isolation valves. 一個薄膜規(guī)控制制成真空度。所有的真空計使用KF16隔離閥門保護。

Venting

排氣

The system comes with a KF25 venting valve, equipped with a silencer/flow limiter

該系統(tǒng)配備一個 KF25 排氣閥，配備消音器/流量限制器。

Gas delivery

氣體輸送

The system is equipped with 2 gas mass flow controller and 1 chamber purge line. Each line is equipped with an additional shut-off valve. The gas is delivered to every slot in the machine by means of a gas manifold.

該系統(tǒng)配備2個質(zhì)量流量控制器和1個腔體吹掃管路。每一條氣體輸送管路都配有一個截止閥。氣體通過氣路輸送至腔體。

Liquid delivery

液體輸送

The system has standardly 1 LDM (Liquid Delivery Module) included. The LDM has all controls on board by its own internal PLC, which is connected to the main PLC of the system. It can easily be replaced by a spare LDM (plug-and-play).

該系統(tǒng)標(biāo)準(zhǔn)包含 1 個 LDM（液體輸送模塊）。 LDM 的所有控制都由其自己的內(nèi)部 PLC 控制，該 PLC 連接到系統(tǒng)的主 PLC。 它可以很容易地被備用 LDM替換（即插即用）。

The LDM allows to bring the process liquid into the right condition before supplying it as a vapor to the coating process. The LDM is connected to the process chamber by a heated and thermally insulated process line. The vapor flow gets further distributed into every process slot, by means of a proprietary heated and thermally insulated manifold.

液體輸送模塊使單體在進入腔體進行工藝處理之前完全氣化。LDM通過加熱管路與腔體進行連接。通過合適的加熱和熱絕緣管路，可以很好的將單體氣化，并進一步輸送到真空腔室。

Plasma electrodes

等離子電極

The plasma electrode module is an assembly of RF-powered and ground electrodes. It offers standardly 6 slots to place a tray holding the components to be treated. In case of larger/higher components, the slots can be defined larger, which will result in lesser slots.

等離子點擊模塊包括射頻供電及接地的電極組件。包括6個標(biāo)準(zhǔn)插槽，放置處理樣品的托盤。對于更大的產(chǎn)品，可以定制更大的插槽，這就會導(dǎo)致插槽數(shù)量的減少。

Due to the modular setup, the machine can easily be changed over to a different geometry by switching the full plasma electrode module.

通過模塊化的電極設(shè)計，設(shè)備可以進行整個模塊化電極的更換。

The RF-powered electrodes are temperature controlled by a recirculating heat exchanger.

射頻電極由循環(huán)熱交換器控制溫度。

Plasma generator

等離子發(fā)生器

The system is equipped with a 2kW 13,56MHZ RF generator. The RF power is transferred by an automatic matching network to the RF-electrodes.

該系統(tǒng)配備了一個 2kW 13.56MHZ 射頻發(fā)生器。 射頻功率通過自動匹配網(wǎng)絡(luò)傳輸?shù)缴漕l電極,進行自動功率匹配。

Component loading

產(chǎn)品上料

Parts to be treated are positioned in a tray. These trays are equipped with wheels. The trays are inserted in between the electrodes, using a rail system inside the chamber. The rail system is integrated in the plasma electrode module.

需要處理的產(chǎn)品放置在托盤中。托盤是配有輪子的。使用腔室內(nèi)的導(dǎo)軌系統(tǒng)將托盤插入電極之間。 導(dǎo)軌系統(tǒng)集成在等離子電極模塊之間。

Useable size of the trays (inner dimension) is approximately 700*600mm. The system can hold up to 6 trays. Maximum height for components in the standard setup is 40mm.

托盤的可用尺寸（內(nèi)部尺寸）約為 700*600mm。 該系統(tǒng)最多可容納 6 個托盤。 標(biāo)準(zhǔn)設(shè)置中可處理的最大高度為 40 毫米。

System controls

控制系統(tǒng)

The system is fully controlled by a PLC. Automatic processing and alarming functions are fully mastered by the PLC, independent of the HMI Operator interaction happens through the HMI.

該系統(tǒng)完全由PLC控制。 自動處理和報警功能完全由 PLC 掌握。操作人員通過人機界面進行設(shè)備的操作。

The HMI is a 17” industrial touch screen PC and offers a very comprehensive and intuitive interface with the user. Depending on the allocated user-level, it allows to run the machine in manual or automatic mode, program process recipes or alter system settings. The HMI is also taking care of the optional historical data logging with exporting functions and standardly allows for remote access support over the internet.

HMI 是一個 17 英寸的工業(yè)觸摸屏 PC，為用戶提供了一個非常全面和直觀的界面。 用戶進入不同的級別，可以在手動或自動模式下運行機器、修稿配方或更改系統(tǒng)設(shè)置。 HMI 還通過導(dǎo)出功能導(dǎo)出歷史數(shù)據(jù)記錄，并允許通過 Internet 進行遠程訪問支持。

Status feedback is also provided through a 5-fold LED signal lamp and buzzer

設(shè)備運行狀態(tài)可以通過LED燈和蜂鳴器進行快速掌握。

Certification

認(rèn)證

The equipment is CE certified

設(shè)備通過CE認(rèn)證

Warranty

質(zhì)保

The warranty period is 12 months

保修期為12個月

Options

選件

Several options available: extra gas lines, extra sets of trays, frame top cover, manual loading

trolley, ERP/MES integration, automatic loading

提供多種選擇：額外的氣體管路、額外的托盤組、框架頂蓋、手動裝載手推車, ERP/MES 集成, 自動裝載裝置

Characteristics 設(shè)備參數(shù)：

Electrical

電力供應(yīng)

3*400V+N+PE at 60A

Compressed air

壓縮空氣

6-8 bar

Clean and dried air according class4 specification of ISO standard 8573.1

根據(jù)ISO 8573.1標(biāo)準(zhǔn)

Cooling water

冷卻水

20°C

20 liter/minute at 2 bar 2bar壓力情況下20升/分鐘

Clear & soft water, free of particles 潔凈水，沒有粒子

Cooling power 6kW 冷卻功率6kW

Process gas

工藝氣體

Purity>99,95% 純度＞99.95%

Pressure : 1-2 bar 壓力1-2bar

Exhaust

尾氣排放

Direct tube to the outside through KF40 flange or hose inner diameter 38mm

通過KF40法蘭或內(nèi)徑38mm軟管連接

Connectivity

網(wǎng)絡(luò)連接

(Proxy-free) internet line 互聯(lián)網(wǎng)

Dimensions

設(shè)備尺寸

2200*16000*1920 (+250 signal light) mm (l*w*h)

Weight

設(shè)備重量

2000 kg